DEVICE TEST APPARATUS AND TEST METHOD INCLUDING CONTROL UNIT(S) BETWEEN CONTROLLER AND TEST UNITS

摘要

ONE TEST BOARD FOR EXECUTING A TEST IS PROVIDED FOR EACH OF A PLURALITY OF DUTS (DEVICES-UNDER-TEST (1601-1603,1701-1703,1801-1803)) SUCH AS SEMICONDUCTOR INTEGRATED CIRCUITS,A MULTI TEST BOARD (1201-1203) CONTROLLER FOR MANAGING THESE TEST BOARDS (1301-1303,1401-1403,1501-1503) IS PROVIDED, AND A PLURALITY OF TEST BOARDS MANAGED BY EACH MULTI TEST BOARD CONTROLLER (1201) ARE OPERATED IN PARALLEL TO SIMULTANEOUSLY PERFORM INDEPENDENT TESTS ON THE RESPECTIVE DUTS.(FIG 2)