SUBSTRATE-REPLACING APPARATUS, SUBSTRATE-PROCESSING APPARATUS, AND SUBSTRATE-INSPECTING APPARATUS

摘要

ABSTRACT A substrate-replacing apparatus that passes a first substrate received from a first carrying part to a second carrying part, and passes a second substrate received from said second carrying part to said first carrying part, including said secondcarrying part that can move forward and backward along a direction orthogonal to a lamination direction of said first substrate and said second substrate, a supporting member that can move relatively in the lamination direction of said substrates with respect to said second carrying part, a first holding part that is attached to saidsupporting member, and can hold one of said first substrate and said second substrate, and a second holding part that is attached to said supporting member at a predetermined distance from the first holding member in the lamination direction of said substrates, and can hold another one of said first substrate and the second substrate; said supporting member and said second carrying part being moved relatively such that, when one of said first holding part and said second holding part is used in receiving said first substrate from said first carrying part, another one of the first substrate and said second substrate is used in receiving said second substrate from said first carrying part.