首页>
外国专利>
NEURAL NETWORK METHODS AND APPARATUSES FOR MONITORING SUBSTRATE PROCESSING
NEURAL NETWORK METHODS AND APPARATUSES FOR MONITORING SUBSTRATE PROCESSING
展开▼
机译:用于监测基质处理的神经网络方法和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
Aspects of the present invention include methods and apparatuses that may be used for monitoring substrate processing systems. One embodiment may provide an apparatus for obtaining in-situ data regarding processing of a substrate in a substrate processing chamber, comprising a data collecting assembly for acquiring training data related to a substrate disposed in a processing chamber, an electromagnetic radiation source, at least one in-situ metrology module to provide measurement data, and a computer, wherein the computer includes a neural network software, wherein the neural network software is adapted to model a relationship between the plurality of the training and other data related to substrate processing.
展开▼