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AN OPTICAL MEASUREMENT SYSTEM WITH SIMULTANEOUS MULTIPLE WAVELENGTHS, MULTIPLE ANGLES OF INCIDENCE AND ANGLES OF AZIMUTH
AN OPTICAL MEASUREMENT SYSTEM WITH SIMULTANEOUS MULTIPLE WAVELENGTHS, MULTIPLE ANGLES OF INCIDENCE AND ANGLES OF AZIMUTH
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机译:具有多个同时入射角,多个入射角和多个方位角的光学测量系统
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摘要
The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.
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