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LASER MATERIAL PROCESSING SYSTEMS AND METHODS WITH, IN PARTICULAR, USE OF A HOLLOW WAVEGUIDE FOR BROADENING THE BANDWIDTH OF THE PULSE ABOVE 20 NM
LASER MATERIAL PROCESSING SYSTEMS AND METHODS WITH, IN PARTICULAR, USE OF A HOLLOW WAVEGUIDE FOR BROADENING THE BANDWIDTH OF THE PULSE ABOVE 20 NM
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机译:激光材料加工系统和方法,特别是使用中空波道来增强20 NM以上脉冲的带宽
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摘要
The present invention relates to laser material processing systems and methods. A further aspect of the present invention employs a laser system (35) for micromachining using a hollow waveguide (27) and a laser beam pulse is given broad bandwidth for workpiece (33) modification.
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