DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPE CONSIST OF SINGULAR BODY

摘要

The present invention relates to a differential interference contrast (DIC) microscope which is designed to three-dimensionally observe an object which is two-dimensionally seen by using interference of light and is usually used in an inspection line of automation equipment such as a semiconductor circuit which needs a measurement of a stereognostic sense and an alloy state of a metal organization. A lens barrel portion has one single lens barrel. A camera portion is arranged on one side of the lens barrel portion and takes an image generated by a microscope. An analyzer filter portion is coupled to a side of the lens barrel portion, rotates from 0 to 180°at an interval of 5° by a control bar, and generates a three-dimensional image of an object. A beam splitter portion is arranged inside the lens barrel portion to use a non-polarization beam splitter of 20x20 cube type and has a non-reflection coating layer formed on its surface. A polarization filter portion is located at the same imaginary line as the beam splitter portion, is coupled to a side of the lens barrel portion, and has a transmissive polarization filter for converting light coming from a lighting portion into polarized light. The lighting portion is coupled to one side of the polarization filter portion and has a light emitting diode (LED) element and a protection cover made of an aluminum-based material formed on its external surface. A DIC prism portion has a DIC prism of a slide bar type as a kind of a polarization prism and is coupled to a lower side of the lens barrel portion. An objective lens is coupled to the other side of the lens barrel portion and has a 5x achromatic lens.