Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth

摘要

The band-pass filter has a stacked pair of film bulk acoustic resonators (FBARs) and an acoustic decoupler (130) between the FBARs. Each of the FBARs has opposed planar electrodes (124,122,114,112) and a layer of piezoelectric material (126,116) between the electrodes. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.