MEMS SENSOR FOR IN SITU TEM ATOMIC FORCE MICROSCOPY

摘要

A force sensor (200) for atomic force microscopy comprising a MBMS or NEMS produced force sensor with a cantilever with a piezo resistive layer on the cantilever (300), wherein the sensor further comprises contact areas (304), a dummy cantilever (301) with a resistive layer, and where the piezoresistive layers are connected to a Wheatstone bridge located on the sensor. The sensor is to be positioned in a TBM apparatus for performing in situ TEM atomic force microscopy.