HIGH REPETITION PULSE POWER SUPPLY AND LITHOGRAPHY SYSTEM WITH HIGH REPETITION PULSE POWER SUPPLY

摘要

A pulse power supply which can perform high repetition by enhancing the throughput of a pulse supply comprising a charger, an initial stage capacitor section equipped with a capacitor charged by the charger, and a magnetic pulse compression circuit performing magnetic pulse compression of a pulse current generated by discharge at the initial stage capacitor section before being outputted, and a lithography system comprising that pulse power supply. The pulse power supply is provided, between the initial stage capacitor section and the magnetic pulse compression circuit, with a transistor for controlling the timing of discharge from the initial stage capacitor section, an inductor constituting a resonance circuit together with the capacitor at the initial stage capacitor section, and a diode for rectifying the pulse current, and further provided with a means for preventing generation of a pulse current in the reverse direction.