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Ion analysis system based on analyzer of ion energy distribution using retarded electric field
Ion analysis system based on analyzer of ion energy distribution using retarded electric field
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机译:基于延迟电场的离子能分布分析仪的离子分析系统
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摘要
An ion analysis system to measure ion energy distribution at several points during a process of manufacturing a semiconductor circuit includes at least two ion flux sensors (397) combined in a single system to measure an ion energy distribution function, each of the ion flux sensors (397) having cells including an opening (222) of 50 micrometers or less.
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