ION ANALYSIS SYSTEM BASED ON ANALYZERS OF ION ENERGY DISTRIBUTION USING RETARDED ELECTRIC FIELDS

摘要

An ion analyzing system based on an ion energy distribution analyzer using retarded electric fields is provided to measure an ion energy distribution function on a substrate surface at plural positions and to analyze a measured spectrum in a data collection system. An ion analyzer is formed in a reactive chamber to measure an ion energy distribution. The ion analyzer includes plural ion flux sensors. The ion flux sensor induces ion flux generated in the reactive chamber into the inside thereof and measure the ion energy distribution by the induced ion flux in real time. The ion flux sensor has a cylindrical body comprised of a base(221) and a wall(226). A hole(222) is formed in the base of the cylindrical body. Retarded potential is applied to grids(223,225). An ion collector(224) carries a current of ion passing through the grid. The grids and the collector are formed on nodes(228,229,230). The nodes are mounted on a socket(227) connected to a retarded voltage and a diagnosis cable.