METHOD AND SYSTEM FOR THE REPRODUCIBLE POSITIONING OF A TARGET OBJECT IN THE EFFECTIVE VOLUME OF A LASER BEAM

摘要

The invention relates to a method and a system for the reproducible positioning of a target object in the effective volume of a first, particularly pulsed laser beam, which can be focused into the effective volume by means of a focusing lens system (2) following a deflecting lens system (1), which is highly reflective for the wavelength of the first laser beam (I) and is permeable for at least one second wavelength, particularly a second laser beam (II), characterized in that the image of a mask element (5) is projected at the desired position (P) of a target object (4) to be positioned in the effective volume (3) through the deflecting lens system (1) using a second, particularly laser, beam, and the degree of defocusing of the image is determined, particularly minimized, on the target object (4) to be positioned.