A liquid delivery system for an electroplating apparatus, an electroplating apparatus with such a liquid delivery system, and a method of operating an electroplating apparatus

摘要

A system for delivering a liquid into a container of an electroplating apparatus is disclosed as including a pipe for receiving the liquid from a liquid source, an outlet for receiving the liquid from the pipe and via which the liquid from the pipe is deliverable into the container, and openings allowing, during operation, the liquid in the container to enter the outlet otherwise than from the pipe.