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APPARATUS FOR FABRICATING BRAGG GRATING AND METHOD OF FABRICATING BRAGG GRATING USING THE SAME APPARATUS IN PLANAR OPTICAL WAVEGUIDE
APPARATUS FOR FABRICATING BRAGG GRATING AND METHOD OF FABRICATING BRAGG GRATING USING THE SAME APPARATUS IN PLANAR OPTICAL WAVEGUIDE
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机译:在平面光学波导中制造布拉格光栅的仪器和使用相同仪器制造布拉格光栅的方法
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摘要
A method and an apparatus for forming a Bragg grating for a planar optical waveguide are provided to form the Bragg grating at accurate positions uniformly by using an automatic exposure controller and an automatic position adjusting unit. An apparatus for forming a Bragg grating for a planar optical waveguide includes a phase mask(304), an exposure controller, and an automatic position adjusting unit. The phase mask forms the Bragg grating. The exposure controller adjusts a UV(Ultra-Violet) beam, which is received on and emitted from the phase mask. The automatic position adjusting unit automatically arranges samples with a planar waveguide configuration and adjusts a position of the exposure controller. The exposure controller includes first and second light blockers(302,305). The automatic position adjusting unit includes X and Y stages(330,308) and a Z stage(320).
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