EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ALIGNER OF WAFER MAPPING SENSOR

摘要

Equipment for manufacturing a semiconductor device and an aligner of a wafer mapping sensor in the equipment are provided to fix an exact position of the wafer mapping sensor and to reduce a repairing time by employing a first feed gauge and a second feed gauge for aiming an incident light. A plate(162) is formed between a light emitting unit and a light receiving unit to be in a horizontal state. A first feed gauge(164) is formed on an upper portion of a side of the plate and is to aim light from the light emitting unit to a predetermined direction. A second feed gauge(166) is formed on the other side of the upper portion of the plate to be opposite to the first feed gauge. The second feed gauge is to aim the light being aimed from the first feed gauge and being received to the light receiving unit. The second feed gauge includes a support(167) and a second hole(168). The support has a predetermined height from the plate. The light passes through the second hole.