Master mandrel used for fabricating X-ray mirrors and replication mehtod using the master mandrel

摘要

The present invention relates to an X-ray mirror replication method using the X-ray mirror replication core and its mirror replication core, using more specifically to high-precision machining apparatus, by using a jig when machining the mirror replication core, and the precision processing equipment X-ray mirror replication using the X-ray mirror replication core and its mirror replication core centering of replication core is easier and minimizing the turbulence caused by the rotation in addition to maximizing the mirror replication success rate to minimize the surface roughness and geometric tolerances in the nanometer It relates to a method. ; According as fixed to the spindle of a precision machining apparatus by processing the replication core to produce an X-ray duplicate mirror For this purpose, the jig to which the first fastening by the fastening means (300) fixed (on the front end of the spindle (1) of the ultra-precision machining apparatus 100); And of the jig 100, the second and the fixed end 210 which is fixed by a fastening means 400, the fixed end 210, neck 220, the neck 220 extending from the front end of the front end of being formed with a mirror portion (230) extending from the distal end, the mirror 230 than the diameter of the neck portion 220 is formed in a large diameter, the difference between the diameter size of the neck portion 220 and mirror portion 230 It characterized in that a processing; by boundary surface 240 is replicated core 200 is formed. ; Soft X-ray mirror, mirror replication method, the model (mandrel)