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FIBER-OPTIC HYDROGEN SENSOR AND HYDROGEN CONCENTRATION MEASURING APPARATUS EMPLOYING THE SAME
FIBER-OPTIC HYDROGEN SENSOR AND HYDROGEN CONCENTRATION MEASURING APPARATUS EMPLOYING THE SAME
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机译:光纤氢传感器和采用该装置的氢浓度测量装置
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摘要
A fiber-optic hydrogen sensor and a hydrogen concentration measuring apparatus employing the same are provided to improve measurement precision for power fluctuation of light emitted from a light source without an additional element. A fiber-optic hydrogen sensor(120) includes a substrate(121), a side-polished optical fiber(123) and a reactive layer(125). The side-polished optical fiber includes a polished part where a clad layer(123b) wrapping a core layer(123a) is partially polished in the longitudinal direction. The side-polished optical fiber is indentedly inserted and coupled to the substrate so that the polished part is exposed to the top surface of the substrate. The reactive layer is formed including palladium on the top surface of the substrate including the polished part of the side-polished optical fiber and installed to be exposed to a target gas.
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