EVAPORATION MODULE OF EVAPORATION MACHINE AND EVAPORATION METHOD UTILIZING THE SAME

摘要

An evaporation module for an evaporator is provided to improve efficiency by adjusting a main evaporation source and preliminary evaporation sources such that the main evaporation source and preliminary evaporation sources are operated at different time zones, thereby reducing the frequency of stopping the evaporation process to replace the evaporation sources, an evaporator comprising the evaporation module is provided, and an evaporation method utilizing the evaporator is provided. An evaporation equipment(30) comprises a shell(31) and an evaporator(32). The evaporator comprises a plurality of evaporation modules(33,39,34,40) and control circuits(325,326). The evaporation module(33) comprises a main evaporation source(321a) and preliminary evaporation sources(321b,321c). The evaporation module(34) comprises a main evaporation source(323a) and preliminary evaporation sources(323b,323c). The control circuit(325) electrically connects the main evaporation source(321a) and the preliminary evaporation sources(321b,321c). The control circuit(326) electrically connects the main evaporation source(323a) and the preliminary evaporation sources(323b,323c). The main evaporation source(321a) of the evaporation module(33) comprises a main evaporation material(35a) and preliminary evaporation materials. The evaporation module(39) comprises an evaporation source(322) that provides an evaporation material(36) to be deposited onto a substrate(20). The main evaporation source(323a) of the evaporation module(34) comprises a main evaporation material(37a) and preliminary evaporation materials. The evaporation module(40) comprises an evaporation source(324) that provides an evaporation material(38) to be deposited onto the substrate.