METHOD FOR PREVENTING THE CORROSION OF A TERMINAL VIA PAD OF A CMOS IMAGE SENSOR AND CMOS IMAGE SENSOR THEREOF

摘要

A method for preventing the corrosion of a terminal via pad of a CMOS image sensor and a CMOS image sensor using the same are provided to improve electrical property of the CMOS image sensor by preventing the corrosion of an exposed metal line by forming an aluminum oxide layer on the surface of the metal line. A method for preventing corrosion of a metal line exposed from a CMOS image sensor comprises following steps of: spraying oxygenated water to the metal line which is exposed by etching a terminal via(S20); forming an aluminum oxide layer on the metal line by a reaction of UV ozone and the metal line(S30); annealing the metal line(S40).