METHOD FOR GENERATING ASSIST FEATURES WITH CONSIDERING EFFECT OF NEIGHBOR PATTERN

摘要

A method for generating assist features taking into account the effect of a neighbor pattern is provided to improve a process margin due to the introduction of the assist features by enlarging a line width of the assist feature. A layout on which major features(210,220) having different line widths are arranged is designed. Separated intervals(440,450) of the major features are detected to set an initial line width of an assist feature(310). A rule for reducing the initial line width of the assist feature is set according to the increase of a line width size adjacent to the assist feature or the decrease of the separated interval between the major features. The line width size of the major feature adjacent to the assist feature and the separated interval between the major features are detected. A reduction width for the initial line width of the assist feature corresponding to the line width size and the separated interval of the detected major feature is extracted from the rule. A real assist feature is created on the layout by applying the reduction width to the initial line width size of the assist feature.