METHOD OF FAILURE ANALYSIS ON DEFECTIVE SEMICONDUCTOR DEVICE AND FAILURE ANALYSIS SYSTEM

摘要

A method of failure analysis on a defective semiconductor device and failure analysis system are provided to grasp the cause of failure during a semiconductor test by making the electric characteristic with respect to the failure into the database. A failure analysis system(110) on a defective semiconductor device includes a cell array on which a plurality of cells having different failures are formed; a test device for digitalizing the measured electric characteristic by measuring the electric characteristic of plural cells; a database storage(120) for storing the digitized electric characteristic of each cell. The plurality of cells are composed of SRAMs.