NON-CONTACT TYPE APPARATUS FOR MEASURING THE HEIGHT OF NEEDLE OF PROBE CARD

摘要

A non-contact type apparatus for measuring a height of a needle of a probe card is provided to obtain reliable data by using a short wavelength laser. A probe card is loaded on a main card installation plate(120). A cover plate(160) is installed on the main card installation plate. The cover plate includes an opening for exposing a center of the main card installation plate. A card installation reference plate(150) has a ring-shaped structure. An outer circumference of the card installation reference plate is loaded on the cover plate. An inner circumference of the card installation reference plate is closely attached to a periphery of the probe card. A laser unit is installed in a top space of the card installation reference plate. A height calculation unit measures a gap between the laser unit and the card installation reference plate in order to obtain a planar equation of the card installation reference plate, detects a gap between an end of the needle and the laser unit, and decides the height of the needle.