Nondestructive inspection device for detecting defect of multilayer piezo-actuator

摘要

A nondestructive inspection device is provided to detect internal defects of a multilayer piezoelectric actuator by converting an electric signal, which is derived from impact energy applied to the actuator, into frequency characteristics. A nondestructive inspection device comprises an impact ball(110), a ball guide device, and a measuring unit(130). The impact ball(110) collides with a surface of a multilayer piezoelectric actuator(10) to transfer impact energy to the multilayer piezoelectric actuator(10). The ball guide device provides dynamic energy to the impact ball(110) to guide the impact ball toward the multilayer piezoelectric actuator(10) fixed on a surface of a specimen fixing table(140). The measuring unit is connected to an external electrode of the multilayer piezoelectric actuator to convert the electric signal into frequency characteristics.