TUBE-FURNACE FOR IMPROVING FERROELECTRICITY OF A FERROELECTRIC THIN LAYER BY APPLYING ELECTRIC FIELD WITH HEAT TREATMENT AND METHOD FOR IMPROVING FERROELECTRICITY OF A FERROELECTRIC THIN LAYER USING THE SAME

摘要

A tube-furnace for improving ferroelectricity of a ferroelectric thin film by applying electric field with heat treatment and a method for improving ferroelectricity of the ferroelectric thin film using the same are provided to prevent increase of a surface roughness of the ferroelectric thin film. A pair of electrodes(12) are installed in a tube-furnace(1) so as to apply electric filed during a thermal treatment. A rotatable sample holder(13) fixes a thin sample located between the electrodes. A gas inlet(14) and a gas outlet(15) are prepared on the tube-furnace. The tube-furnace has a T-shape. The sample holder has a lode-lock shape and rotates for 360 degrees. A cross section of the electrode is greater than a total size of the thin sample fixed by the sample holder and electric field is applied to the whole surface of the thin sample.