Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers

摘要

A method for forming hydrophilic polymer layer-hybridized microchannels is provided to form a micropattern on a hydrophilic polymer through a curing process, and reduce expense and time as compared with the conventional manufacturing methods. A method for forming hydrophilic polymer layer-hybridized microchannels includes the steps of: preparing a silicon master having a micropattern; depositing a release agent on the pattern-formed side of the master; coating the deposited surface with hydrophilic polymer; laminating a crosslinkable polydimethylsiloxane solution on the hydrophilic polymer layer, and then performing light curing; and removing the silicon master after the curing.