首页> 外国专利> METHOD FOR FORMING FINE COPPER PARTICLE SINTERED PRODUCT TYPE OF ELECTRIC CONDUCTOR HAVING FINE SHAPE, METHOD FOR FORMING FINE COPPER WIRING AND THIN COPPER FILM USING SAID METHOD

METHOD FOR FORMING FINE COPPER PARTICLE SINTERED PRODUCT TYPE OF ELECTRIC CONDUCTOR HAVING FINE SHAPE, METHOD FOR FORMING FINE COPPER WIRING AND THIN COPPER FILM USING SAID METHOD

机译:具有细形状的导体的细铜颗粒烧结产品类型的形成方法,利用所述方法形成细铜布线和薄铜膜的方法

摘要

The present invention, by using a dispersion of copper fine particles having a surface oxide film layer, after fine pattern writing, under a relatively low temperature, subjected to reduction treatment in the fine copper particles or copper oxide particles having a surface oxide film layer in the pattern, the copper fine particles to generate the firing, and offers a method of forming a fine-shaped conductor of a copper fine particle sintered product which exhibits excellent conductivity, a dispersion containing the copper fine particles or the copper oxide fine particles having a surface oxide film layer or less of the average particle diameter on the substrate 10㎛ coated, and then by heating the fine particles in the coating layer, the compounds of the vapor having reducing ability, to an atmosphere of a temperature below 350 ℃, including gas, oxide, by a reduction reaction using a compound having its reducibility as a reducing agent subjected to reduction of the coating film, and subsequently, by heating a combination of the original process and the oxidation treatment in a short time jaehwan repeating the process, a step of forming a sintered product layer of copper fine particles obtained cross, carried out in a series of heat treatment processes. ; Conductor, or a forming method
机译:通过使用具有表面氧化物膜层的铜微粒的分散体,在精细图案写入之后,在相对较低的温度下,对具有表面氧化物膜层的铜微粒或具有表面氧化物膜层的铜氧化物颗粒进行还原处理。图案,铜微粒以产生烧成,并提供一种形成导电性优异的铜微粒烧结体的微细形状的导体的方法,该分散体包含具有以下特征的铜微粒或氧化铜微粒:在涂覆的基材10′上的平均表面直径或以下的平均氧化膜层以下,然后通过加热涂覆层中的细颗粒,将具有还原能力的蒸气的化合物加热到温度低于350℃的气氛中,包括通过使用具有还原性的化合物作为被覆膜被还原的还原剂,通过还原反应产生气体,氧化物和因此,通过在短时间内重复进行该原始工艺和氧化处理的加热来重复该工艺,在一系列热处理工艺中进行形成所获得的铜细颗粒的烧结产物层的步骤。 ;导体或形成方法

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