SUBSTRATE PROCESSING APPARATUS, HISTORY INFORMATION RECORDING METHOD, HISTORY INFORMATION RECORDING PROGRAM, AND HISTORY INFORMATION RECORDING SYSTEM

摘要

And a substrate processing apparatus including a plurality of process chamber for processing a substrate, the substrate carry section to import / export from a plurality of process chamber or in a plurality of process chambers, the transport history recording, the process history storage unit, and the alarm history storage unit It included. Conveying the history recording unit records the history information about the transport of the substrate by the transport section as first history information in the history information in association with the conveyance of each substrate, the substrate. History recording process is associated to each of the substrate to be treated the history information about the process state of the substrate at each of the plurality of process chambers, and records the history information about the process state as second history information. Alarm history storage unit is associated historical information about the alarm is generated in at least one of the carry section and the process chamber in each of the substrate, and records the history information regarding the alarm as the third log information.