DUAL TECHNOLOGY CONFOCAL AND INTEREROMETRIC OPTICAL PROFILOMETER FOR THE INSPECTION AND THREE-DIMENSION MEASUREMENT OF SURFACES

摘要

Dual Technology (confocal and interferometric) for 3D inspection and measurement of the present invention is an optical surface profile relates to Romi foundation. The present invention includes: a light source (LED), (at least one of the polarizing) beam splitter, the illumination pattern generating means (LCOS micro-display), and that can be used to obtain confocal images and interferometric lenses conventional image interferometric microscope lens interchangeable lens that can be used to obtain. According to the present invention, the micro-display is to generate a set of lighting patterns, or to obtain the confocal image, all the pixels by the entire lighting opening makes it possible to obtain an interferometric images. The design of the meter to the profile of the present invention is compact, and can be measured rapidly by micro-and nano-scale, without any kind of contact surface shape and material, including structured or stratified samples containing different materials.