A method for controlling mechanical stresses in the structure of the film substrate

摘要

method u043au043eu043du0442u0440u043eu043bu00a0 mechanical u043du0430u043fu0440u00a0u0436u0435u043du0438u0439 in the film - substrate, comprising the formation of an intermediate between the film and substrate u0441u043bu043eu00a0 the intended thickness of the sun u043au0440u044bu0442u0438u0435 sheeting method u0444u043eu0442u043eu043bu0438u0442u043eu0433u0440u0430u0444u0438u0438 windows, the strips of film at the edge of the window 5 to 100 microns in width by selective u0442u0440u0430u0432u043bu0435u043du0438u00a0 intermediate u0441u043bu043eu00a0,the definition of relative u0443u0434u043bu0438u043du0435u043du0438u00a0 film on u0438u043du0442u0435u0440u0444u0435u0440u0435u043du0446u0438u043eu043du043du043eu0439 painting in u0437u0430u0437u043eu0440u0435 film - substrate and the calculation formula of mechanical u043du0430u043fu0440u00a0u0436u0435u043du0438u0439;where l is the length of the free u043au0440u0430u00a0 oxide, u0438u0441u0445u043eu0434u043du0430u00a0 length l0 - u043eu043au0441u0438u0434u043du043eu0439 films before her u043eu0442u0434u0435u043bu0435u043du0438u00a0, ef, f - young's modulus and poisson's ratio of film, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, windows at the tape shaped in the form of a circle, and the elongation u043eu043fu0440u0435u0434u0435u043bu00a0u044eu0442 in u0440u0430u0434u0438u0430u043bu044cu043du043eu043c direction.