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Method for controlling tensile and compressive stresses and mechanical problems in thin films on substrates
Method for controlling tensile and compressive stresses and mechanical problems in thin films on substrates
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机译:控制基板上薄膜中的拉伸应力和压缩应力以及机械问题的方法
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摘要
A method for forming thin films and controlling the tensile and compressive stresses and mechanical properties of the thin film. The method includes forming an alloy on a substrate having a solvent metal and a solute, then annealing the substrate and the alloy in one of an oxidizing, nitriding and carborizing ambient so that the ambient reacts with the solute to form respectively one of an oxide, nitride and carbide precipitates of the solute in the solvent. The solute is selected so that the precipitates formed may be used to control the mechanical properties of the solvent.
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