Method and apparatus for plasma coating of workpieces with spectral evaluation of the process parameters and use of the device

摘要

A method for the coating of containers induced by means of plasma chemical vapor deposition, in which a nitrogen-containing process gas introduced into a coating chamber and by means of electromagnetic energy, a plasma in at least one of the container adjacent region of the coating chamber is ignited, in which the process gas is present, characterized in that the coating process by means of at least of a measured spectral parameter of the plasma can be determined and the container in the event of a deviation from a target range of the parameter of the container is sorted out, wherein with the aid of the measurement of the spectral parameter of the intensity of a transmit - or absorption line of nitrogen, it is established whether the container has a leak.