Process and apparatus for plasma coating of workpieces with spectral evaluation of process parameters

摘要

The plasma coating process has the components [11], eg bottles, fed on a linear conveyor and transferred onto a rotary table [3] that has a number of holders [15] with coating chambers [17,19] that are subjected to evacuation pumping. Process gas is introduced by a lance [20]. Pulsed electromagnetic energy is applied to generate a plasma [40] with a computer [25] receiving sensed parameters controlling the process. The containers are then transferred onto an output conveyor [9].