首页> 外国专利> Electronic component e.g. silicon controlled rectifier, manufacturing method, involves doping portion of body regions by introducing dopant atoms into portion through intermediate region formed between separate gate regions

Electronic component e.g. silicon controlled rectifier, manufacturing method, involves doping portion of body regions by introducing dopant atoms into portion through intermediate region formed between separate gate regions

机译:电子元件例如硅可控整流器,一种制造方法,涉及通过将掺杂剂原子引入穿过分开的栅极区域之间形成的中间区域的部分来掺杂主体区域的一部分

摘要

The method involves forming doped connection regions (502, 503) on and/or over a substrate. Body regions (504, 505) are formed between the doped connection regions. Two separate gate regions are formed on and/or over the body regions, and a portion of the body regions is doped by introducing dopant atoms. The introduction of the dopant atoms into the portion of the body regions is carried out through an intermediate region formed between the separate gate regions. Independent claims are also included for the following: (1) a drain extended MOS field-effect transistor comprising two doped connection regions (2) an electronic component arrangement comprising drain extended MOS field-effect transistors.
机译:该方法包括在衬底上和/或上方形成掺杂的连接区域(502、503)。在掺杂的连接区域之间形成主体区域(504、505)。在主体区域上和/或上方形成两个分开的栅极区域,并且通过引入掺杂剂原子对主体区域的一部分进行掺杂。通过形成在分开的栅极区域之间的中间区域将掺杂剂原子引入到主体区域的一部分中。还包括以下方面的独立权利要求:(1)包括两个掺杂的连接区域的漏极扩展的MOS场效应晶体管(2)电子元件布置,其包括漏极扩展的MOS场效应晶体管。

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