首页> 外国专利> Method for coating bodies by magnetron sputtering for forming protective layers on tools comprises feeding an electric power through power sources to the magnetron so that a specified maximum peak height of the power is reached

Method for coating bodies by magnetron sputtering for forming protective layers on tools comprises feeding an electric power through power sources to the magnetron so that a specified maximum peak height of the power is reached

机译:通过磁控管溅射法涂覆物体以在工具上形成保护层的方法包括:通过电源向磁控管供电,以达到规定的最大功率峰值高度

摘要

Method for coating bodies by magnetron sputtering comprises feeding an electric power through power sources to the magnetron so that the maximum peak height of the power is more than 500 W/cm2 based on the surface of the target.
机译:通过磁控管溅射来涂覆主体的方法包括通过电源向磁控管馈送电力,使得电力的最大峰值高度基于靶材的表面大于500W / cm 2。

著录项

  • 公开/公告号DE102006021994A1

    专利类型

  • 公开/公告日2007-11-15

    原文格式PDF

  • 申请/专利权人 CEMECON AG;

    申请/专利号DE20061021994

  • 发明设计人 CREMER RAINER;

    申请日2006-05-10

  • 分类号C23C14/35;

  • 国家 DE

  • 入库时间 2022-08-21 19:49:57

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