首页> 外国专利> Crystal pulling apparatus for the production of heavy crystals by Czochralski method, comprises crystal hub- and rotating device by which the crystal is pulled at its neck hanging from a melt, and crystal support device having a base body

Crystal pulling apparatus for the production of heavy crystals by Czochralski method, comprises crystal hub- and rotating device by which the crystal is pulled at its neck hanging from a melt, and crystal support device having a base body

机译:通过切克劳斯基方法生产重晶的拉晶设备,包括晶体轮毂和旋转装置,通过该装置将晶体从熔体垂下的脖子拉出,以及具有基体的晶体支撑装置

摘要

The crystal pulling apparatus for the production of heavy crystals by Czochralski method, comprises a crystal hub- and rotating device by which the crystal is pulled at its neck (4) hanging from a melt, and a crystal support device having a lifting base body (1) freely lowerable and coupled with the crystal hub- and the rotating device. The neck has an upper thinner area, a lower thinner area and a bulge (10) arranged between the upper and the lower thinner areas. Two handles (7) are positioned on the base body in such a way that they are able to pass the bulge into a working position. The crystal pulling apparatus for the production of heavy crystals by Czochralski method, comprises a crystal hub- and rotating device by which the crystal is pulled at its neck (4) hanging from a melt, and a crystal support device having a lifting base body (1) freely lowerable and coupled with the crystal hub- and the rotating device. The neck has an upper thinner area, a lower thinner area and a bulge (10) arranged between the upper and the lower thinner areas. Two handles (7) are positioned on the base body in such a way that they are able to pass the bulge into a working position in which the handles are fastened beneath the bulge. Each handle is arranged around a rotating axis (8) revolving at the base body, which has a stop for determining the resting position and the working position. The base body is a ring surrounding the neck. The handles are uniformly arranged on the circumference by the ring and are bringable from the resting position to the working position by an actuator arranged at a housing of the apparatus. A part of the handle is implemented as a rod (9) that protrudes in the resting position radially outward over the edge of the crystal. The rod cooperates with the actuator, which is arranged in the area of the apparatus. The actuator is implemented as poles that pass tangential to the crystal and that exist itself within a moving direction of the rod. The poles are foldably held at the housing and the handles are bringable to a horizontal position of the apparatus by the poles for the manipulation. The apparatus has means by which the rotating motion of the hub and the rotating device are controllable and synchronizable. The further hub- and rotating device are arranged over a load sensor and a torque sensor. Independent claims are included for: (1) a support device for crystal pulling apparatus; and (2) Czochralski method for the production of heavy crystals.
机译:通过Czochralski法生产重晶的拉晶设备包括:晶体轮毂和旋转装置,通过该装置将晶体从熔体垂下的脖子(4)上拉出;以及具有支撑基体的晶体支撑装置( 1)可自由降低并与晶体轮毂和旋转装置耦合。颈部具有上部较薄区域,下部较薄区域以及在上部和下部较薄区域之间布置的凸起(10)。将两个手柄(7)放置在基体上,以使其能够将凸出部分传递到工作位置。通过Czochralski法生产重晶的拉晶设备包括:晶体轮毂和旋转装置,通过该装置将晶体从熔体垂下的脖子(4)上拉出;以及具有支撑基体的晶体支撑装置( 1)可自由降低并与晶体轮毂和旋转装置耦合。颈部具有上部较薄区域,下部较薄区域以及在上部和下部较薄区域之间布置的凸起(10)。两个手柄(7)以这样的方式定位在基体上,即,它们能够将凸出部传递到工作位置,在该工作位置中,手柄固定在凸出部下方。每个手柄围绕在基体上旋转的旋转轴(8)布置,该旋转轴具有用于确定静止位置和工作位置的挡块。基体是环绕脖子的环。手柄通过环均匀地布置在圆周上,并且可以通过布置在设备的壳体处的致动器从静止位置移动到工作位置。手柄的一部分被实现为杆(9),该杆(9)在静止位置径向向外伸出晶体边缘。杆与布置在设备区域内的致动器配合。致动器被实施为与晶体相切地穿过并且自身存在于杆的移动方向内的极。杆可折叠地保持在壳体上,并且通过杆可将手柄带到设备的水平位置以进行操纵。该设备具有可控制和同步轮毂和旋转装置的旋转运动的装置。另一个轮毂和旋转装置布置在负载传感器和扭矩传感器上方。包括以下独立权利要求:(1)用于拉晶设备的支撑装置;以及(2)Czochralski法生产重晶体。

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