Process to shape optical lens for use in e.g. lithographic applications using pre-shaped rotation-symmetrical aspheric unfinished lens

摘要

In a process to make an aspheric lens for use e.g. in conjunction with lithography, the pre-shaped lens is presented and a certain quantity of material is removed to a target surface profile. The pre-shaped lens is a rotation-symmetrical aspheric unit, whose unfinished shape is as close as possible to the target spherical surface. Es hat sich ge-zeigt, dass bei der Herstellung einer Freiformflache unter diesen Voraussetzungen die Menge an abzutragenden Ma-terial verringert werden kann. Auf diese Weise konnen pra-zisere Freiformflachen wirtschaftlich hergestellt werden.