Method for compensating for production reasons, the incident deviations in the production of micromechanical elements and their use

摘要

The present invention relates to micromechanical elements, a process for their preparation and their use, which in the case of a resonant frequency are to be deflected. It is therefore an object of the invention as a consequence of the occurring deviations, the influence on the resonant frequency of micromechanical elements have, in a simple and cost-effective manner to be able to compensate for. According to the invention, the procedure is such that simultaneously with the formation of the channels by dry etching, with which at least one spring element, a deflecting element and, if necessary, also a frame element of micromechanical elements are formed, at the deflectable element additional trenches and / or depressions are designed. As a result, the trenches and depressions each case under the same process parameters on the respective micromechanical element or all of the micromechanical elements are formed of a charge. A material removal of material during the etching, preferably dry etching, therefore, takes place under the same etching conditions, so that each of the remote mass of the trenches and / or depressions of the etching process parameters is influenced in the same manner.