Plasma system i.e. plasma coating device, for sputtering or coating of e.g. DVD, has control circuit shifting source into idle condition lasting for time period that is allowed after each interruption, and achieves current limiting value

摘要

The system has a pair of electrodes (4, 5), and an electric supply unit (1) with an electrical energy source (100), whose output circuit points are connected with the electrodes. A control circuit (8) detects occurrence of an electric arc (3) and/or break down between the electrodes, and disconnects the supply to the points, during the occurrence. The circuit shifts the source from a loading condition into an idle condition, which lasts for a time period, which is allowed after each interruption, and achieving a current limiting value of a current (I) flowing over the electrodes. An independent claim is also included for a method for the operation of an electrical supply unit for a plasma system.