首页> 外国专利> A method for producing a ferroelectric thin film of the bismuth - sodium - titanate - system on a substrate -, and use of the ferroelectric thin film

A method for producing a ferroelectric thin film of the bismuth - sodium - titanate - system on a substrate -, and use of the ferroelectric thin film

机译:在基板上制造铋-钛酸钠-体系的铁电薄膜的方法以及该铁电薄膜的用途

摘要

The method involves providing a substrate (14) with a substrate upper surface e.g. electrically conductive substrate upper surface. Ferroelectric main composition of a ferroelectric material is provided, where the composition has a stoichiometric sodium surplus, which is selected in the range of 10 molecular percentages and 30 molecular percentages. A sol gel layer is formed with the main composition on a substrate surface and is heated, where the composition has with acetate, sodium acetate and titanium isopropylate. The sol gel layer is transferred into a ferroelectric thin layer (13).
机译:该方法包括为衬底(14)提供例如衬底上表面。导电衬底的上表面。提供了铁电材料的铁电主要成分,其中该成分具有化学计量的钠过剩,其在10个分子百分数和30个分子百分数的范围内选择。在主体表面上形成具有主要成分的溶胶凝胶层,并对其进行加热,其中该成分具有乙酸盐,乙酸钠和异丙基钛酸盐。溶胶凝胶层被转移到铁电薄层(13)中。

著录项

  • 公开/公告号DE102006046979B8

    专利类型

  • 公开/公告日2008-08-28

    原文格式PDF

  • 申请/专利权人 SIEMENS AG;SIEMENS AG;

    申请/专利号DE20061046979

  • 发明设计人

    申请日2006-10-04

  • 分类号H01L41/24;H01L41/187;H01L27/105;B81C1/00;B81B1/00;H03H9/15;

  • 国家 DE

  • 入库时间 2022-08-21 19:49:41

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