Plasma source, has plasma container in housing for surrounding plasma cavity, and metal block electrically staying in connection with anode, where coating made of electrically high-conductive material is provided on external side of block

摘要

The plasma source has a housing (1) at a ground potential, where a plasma container is provided in the housing for surrounding a plasma cavity (2). A metal block (4) electrically stays in connection with an anode (6) and electrically isolated against the housing by an insulator (5). The insulator is formed by an insulating ring made from an electrically non-conductive material e.g. ceramic. A coating made of an electrically high-conductive material e.g. silver or gold, is provided on the external side of the metal block.