Semiconductor switch for e.g. laser applications, has semiconductor chips laminated in alternating manner with intermediate layer of metallic bodies, and exhibiting hollow spaces or slots, which represents hollow or coaxial conductor

摘要

The switch has a semiconductor switching units e.g. MOS field effect transistor, that are connected in series to reduce voltage per switching units. A stack of semiconductor chips are formed with the semiconductor switching units. The chips are laminated in an alternating manner with an intermediate layer of metallic bodies (2), which represents electrical connections for a series circuit. The layer has hollow spaces or slots, which represents hollow conductor or coaxial conductor or individual side surfaces of the hollow conductor or coaxial conductor.