Beam deflecting device for use as piezo-driver adjustable mirror, has reflector arranged opposite to another reflector such that beam impinges again at former reflector once beam is reflected from latter reflector

摘要

The device (7) has a reflector (1) that is pivotingly movable using a piezoelectric actuator (6) for deflecting an incident beam (4', 4'') of an electromagnetic radiation to an operating point within an operating field. The reflector is arranged opposite to another reflector (2) in such a manner that the beam, which is incident at the reflector (1), impinges again at the reflector (1) once the beam is reflected from the reflector (2), before the deflected beam is deflected on the operating point. The reflector (2) is implemented as a stationary mirror.