Silicon disk, for use in electronic components, has a zone of rotational symmetry with a low bulk micro defect density

摘要

The silicon disk, cut from a single crystal, has a zone with rotational symmetry of at least 80% of its radius with agglomerates of crystal lattice empty spaces of at least 30 nm in a maximum density of 6-10 3 cm 3 and of 10-30 nm in a density of 1-10 5 cm - 3 to 3-10 7 cm - 3. The oxidation stacking fault (OSF) nuclei have a density of 0-10 cm - 2 with an internal mean bulk micro defect (BMD) density of 5-10 8 cm - 3 to 5-10 9 cm - 3. The disk has a front layer free of BMD.