Substrate for liquid from face ends of the head, the liquid from tos transmitter head, with these elements equipped with liquid from tos transmitter apparatus, a manufacturing method for the liquid from face ends of the head and a driving method for these

摘要

PROBLEM TO BE SOLVED: To provide a liquid discharge head or the like which can sufficiently remove current noises and can reduce costs. ;SOLUTION: The substrate for liquid discharge head is used for a liquid discharge head for discharging liquid by applying a discharge energy to the liquid. The substrate has a semiconductor substrate with an energy conversion element for converting an electric energy to the discharge energy. The semiconductor substrate has a function element set as a capacitor to cope with source noises. The function element includes at least a first barrier layer 33, a ferroelectric material film 32 and a second barrier layer 33 sequentially layered. Each barrier layer 33 is comprised of a film including a cavitation film member set to protect the substrate constituting the liquid discharge head.;COPYRIGHT: (C)2001,JPO