Micromechanical component for e.g. frontal display, has sensor for modifying driving force of microdevice according to rotational position and/or rotational movement of microdevice, so that microdevice attains preset natural frequency

摘要

The component (10) has an oscillating microdevice (20) e.g. micromirror, pivoting around a rotational axis (12), and a capacitive or inductive type driving unit (30) e.g. capacitive or inductive motor, driving the microdevice. The driving unit exerts driving force on the microdevice. A sensor (15) presents a piezo-resistant structure to detect rotational position and/or rotational movement of the microdevice around the axis, and to modify the driving force of the microdevice according to the position and/or the movement, so that the microdevice attains a preset natural frequency. An independent claim is also included for a method for balancing a micromechanical component.