SPECTROSCOPIC SENSOR, FLUORESCENCE DETECTION METHOD AND FLUORESCENCE DETECTION DEVICE USING SPECTROSCOPIC SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a spectroscopic sensor superior in wavelength resolution.;SOLUTION: The spectroscopic sensor 1 has a semiconductor substrate 11 having the impurity concentration of 1×10¹³ to 1×10¹⁶ cm^-3, a first diffusion layer 12 formed on the semiconductor substrate 11, a second diffusion layer 13 formed in a part of the first diffusion layer 12, and an electrode film 15 formed on the first diffusion layer 12 via an insulating film 14, passing the incident light and impressed with gate voltage. When changed in a range of the gate voltage 1-20 V while applying a predetermined voltage on the substrate 11, the impurity concentration of the first diffusion layer 12 is set to a predetermined value of a range of the concentration of 5-50 times of the semiconductor substrate 11, and the depth of the first diffusion layer 12 is set to a predetermined value of a range of 0.1-20 μm, so as to become the electric potential distribution of not having a neutral area of becoming constant in electric potential, in the depth direction from a surface of the first diffusion layer 12.;COPYRIGHT: (C)2009,JPO&INPIT