METHOD FOR MANUFACTURING THIN FILM OF METALLIC IRIDIUM AND/OR IRIDIUM OXIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of metallic iridium and/or an iridium oxide on a three-dimensional structure so as to adequately cover the step as well.;SOLUTION: The thin film of metallic iridium and/or the iridium oxide is formed on a substrate such as glass or silicon, by spraying an alcohol solution (for instance, a solution of methanol, ethanol, propanol or the like) of an iridium complex (for instance, (1,3-cyclohexadiene) (ethylcyclopentadienyl) iridium or the like) onto the substrate which has been heated to a decomposition temperature of the iridium complex or higher.;COPYRIGHT: (C)2010,JPO&INPIT