INTRODUCTION PLAN ADJUSTING METHOD AND INTRODUCTION PLAN ADJUSTMENT SYSTEM FOR SEMICONDUCTOR DEVICE MANUFACTURING LINE

摘要

PPROBLEM TO BE SOLVED: To provide introduction plan adjustment techniques for a semiconductor device manufacturing line that reduce variance in manufacture start number by predicting an occurrence step wherein a bottleneck due to an introduction plan is caused and occurrence timing and automatically adjusting the introduction plan so that a lot pulsation at the bottleneck step may be reduced. PSOLUTION: The introduction plan adjusting method for the semiconductor device manufacturing line includes a step of performing manufacture start simulation on the basis of input of an initial introduction plan, a step of calculating transition of manufacture start lot numbers by the device group, a step of selecting a device group having largest variance in manufacture start lot number, a step of selecting a lot whose introduction period is to be adjusted, a step of simulating variation in manufacture start lot number of other device groups, a step of calculating an evaluated value of variance in manufacture start number of all the device groups, a determining step of the evaluated value of the variance in manufacture start number, and a step of changing an instruction period of a lot, thereby reducing variance in manufacture start number between device groups. PCOPYRIGHT: (C)2009,JPO&INPIT