HIGH-ACCURACY LASER BEAM PROCESSING AND LASER BEAM-ELECTROLYSIS COMPOSITE PROCESSING APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide a high-accuracy laser beam processing apparatus which is innovative and highly unique by adopting a construction that can measure the shape, position, and posture of a very small workpiece and its position relative to a laser beam using a laser beam source for processing. PSOLUTION: The high-accuracy laser beam processing apparatus comprises a work holding error correcting means that measures the initial position of a workpiece with a measuring laser beam, measures a rotated position after the rotation of the workpiece at a predetermined angle with a work holding means, grasps a three-dimensional position of the workpiece with a control unit, and determines a processing irradiation point of the workpiece to correct a holding error of the workpiece. PCOPYRIGHT: (C)2009,JPO&INPIT