PROBLEM TO BE SOLVED: To manufacture a minute through-hole structure with highly accurate and minute through-holes by preventing sticking between a body to be worked and a buffering thin film layer, reducing manufacturing costs without a productivity damaged, and avoiding breakage of a mold member.;SOLUTION: The manufacturing method includes the forming process of sequentially forming on a holding member 10 the buffering thin film layer 11 formed of a material with a softening point higher than a predetermined heating temperature and the body to be worked 12, the heating process of heating the body 12 and a mold 13 set opposite to the body 12 with a transfer pattern 14 formed to the body 12 in which at least one of the body 12 and the mold 13 is heated to the heating temperature, the pressing process of pressing the mold 13 into the body 12, the cooling process of cooling the body 12 and the mold 13, the mold releasing process of separating the mold 13 from the body 12, and the body separating process of separating the body 12 from the buffering thin film layer 11.;COPYRIGHT: (C)2009,JPO&INPIT
展开▼
